Maximilian Rumler



Organisation


Lehrstuhl für Elektronische Bauelemente


Project member


(EXC 315: New Materials and Processes - Hierarchical Structure Formation for Functional Devices):
EXC 315/2: Engineering of Nanoelectronic Materials - B6 (Druckbare Elektronik)
Prof. Dr. Lothar Frey
(01/11/2012 - 31/10/2017)


Publications (Download BibTeX)

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Förthner, M., Girschikofsky, M., Rumler, M., Stumpf, F., Rommel, M., Hellmann, R., & Frey, L. (2018). One-step nanoimprinted Bragg grating sensor based on hybrid polymers. Sensors and Actuators A-Physical, 283, 298-304. https://dx.doi.org/10.1016/j.sna.2018.09.053
Steinberg, C., Rumler, M., Manuel, R.A., Papenheim, M., Wang, S., Mayer, A.,... Scheer, H.-C. (2017). Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques. Microelectronic Engineering, 176, 22-27. https://dx.doi.org/10.1016/j.mee.2017.01.009
Förthner, M., Papenheim, M., Rumler, M., Stumpf, F., Baier, L., Rommel, M.,... Frey, L. (2017). Polymerization related deformations in multilayer soft stamps for nanoimprint. Journal of Applied Physics, 122(16). https://dx.doi.org/10.1063/1.5001463
Rumler, M., Kollmuss, M., Baier, L., Michel, F., Förthner, M., Becker, M.,... Frey, L. (2016). Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication. SPIE-INT SOC OPTICAL ENGINEERING, PO BOX 10, BELLINGHAM, WA 98227-0010 USA.
Förthner, M., Rumler, M., Stumpf, F., Fader, R., Rommel, M., Frey, L.,... Klein, J.J. (2016). Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings. Applied Physics A-Materials Science & Processing, 122(3). https://dx.doi.org/10.1007/s00339-016-9767-6
Kaliya Perumal Veerapandian, S., Beuer, S., Rumler, M., Stumpf, F., Thomas, K., Pillatsch, L.,... Rommel, M. (2015). Comparison of silicon and 4H silicon carbide patterning using focused ion beams. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365(365), 44-49. https://dx.doi.org/10.1016/j.nimb.2015.07.079
Scharin, M., Rommel, M., Dirnecker, T., Marhenke, J., Herrmann, B., Rumler, M.,... Herrmann, M. (2014). Bioactivation of plane and patterned PDMS thin films by wettability engineering. BioNanoScience, 4(3), 251-262. https://dx.doi.org/10.1007/s12668-014-0145-6
Landwehr, J., Fader, R., Rumler, M., Rommel, M., Bauer, A., Frey, L.,... Spiecker, E. (2014). Optical polymers with tunable refractive index for nanoimprint technologies. Nanotechnology, 25(50), Article number 505301. https://dx.doi.org/10.1088/0957-4484/25/50/505301
Fader, R., Rommel, M., Bauer, A., Rumler, M., Frey, L., Verschuuren, M.A.,... Schoembs, U. (2013). Accuracy of wafer level alignment with substrate conformal imprint lithography. Journal of Vacuum Science & Technology B, 31(6), 6FB02. https://dx.doi.org/10.1116/1.4824696
Rumler, M., Fader, R., Haas, A., Rommel, M., Bauer, A., & Frey, L. (2013). Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication. Nanotechnology, 24(36), 365302. https://dx.doi.org/10.1088/0957-4484/24/36/365302

Last updated on 2017-14-10 at 02:00