Publications (152,962)

Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO

Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H (1999)

Conference contribution, Conference Contribution

Zetzsche C, Krieger G, Wegmann B (1999)

Journal article

Krajewski M (1999)

Journal article

Sieckmann JR (1999)

Authored book

Wilke P (1999)

Conference contribution, Conference Contribution

Rehm G, Brand H (1999)

Conference contribution, Conference Contribution

Erb J, Ngo C, Schaller G, Engelbrecht R (1999)

Conference contribution, Conference Contribution

Engelbrecht R, Fenske T, Brand H (1999)

Conference contribution, Conference Contribution

Huber K, Engelbrecht R, Hocke R, Raum M, Brand H, Martius S, Schmidt LP (1999)

Conference contribution, Conference Contribution

Holmer L, Popov L, Lehnert O (1999)

Journal article

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