Strain relaxation of Si/SiGe heterostructures by a geometric Monte Carlo approach

Gradwohl KP, Liu Y, Richter C, Boeck T, Martin J, Albrecht M (2023)


Publication Type: Journal article

Publication year: 2023

Journal

Book Volume: 17

Pages Range: 2200398

Journal Issue: 6

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How to cite

APA:

Gradwohl, K.-P., Liu, Y., Richter, C., Boeck, T., Martin, J., & Albrecht, M. (2023). Strain relaxation of Si/SiGe heterostructures by a geometric Monte Carlo approach. Physica Status Solidi-Rapid Research Letters, 17(6), 2200398.

MLA:

Gradwohl, Kevin-Peter, et al. "Strain relaxation of Si/SiGe heterostructures by a geometric Monte Carlo approach." Physica Status Solidi-Rapid Research Letters 17.6 (2023): 2200398.

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