Room temperature sputtered silicon nitride microcombs and real-Time Hz-level tunable laser spectroscopy
Bi T, Zhang S, Harder I, Ohletz O, Gannott F, Gumann A, Butzen E, Zhang Y, Del'Haye P (2025)
Publication Type: Conference contribution
Publication year: 2025
Journal
Publisher: SPIE
Book Volume: 13528
Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering
Event location: Prague, CZE
ISBN: 9781510688520
DOI: 10.1117/12.3056266
Abstract
Reactively sputtered silicon nitride thin films offer the combination of ultralow optical losses, film thickness above >700nm in a single deposition step, and low processing temperature. Employing this process, we demonstrate microresonators exhibiting Q-factors of 1 million without thermal annealing and 10 million with 800°C thermal annealing in the L-band. Since the waveguides of the ring resonators exhibit anomalous dispersion soliton microcombs can be generated. We will also present a tunable laser spectroscopy scheme where a frequency modulated tunable diode laser is referenced to a fiber cavity. The fiber cavity free-spectral range is determined, in real time, to a sub 10-Hz level over a spectral range of 11 THz at a scanning speed of 1 THz/s. The scheme is applied onto dispersion measurements of integrated microresonators.
Authors with CRIS profile
Involved external institutions
Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light
Germany (DE)
Technical University of Denmark / Danmarks Tekniske Universitet (DTU)
Denmark (DK)
The Chinese University of Hong Kong (CUHK)
China (CN)
Germany (DE)
Technical University of Denmark / Danmarks Tekniske Universitet (DTU)
Denmark (DK)
The Chinese University of Hong Kong (CUHK)
China (CN)
How to cite
APA:
Bi, T., Zhang, S., Harder, I., Ohletz, O., Gannott, F., Gumann, A.,... Del'Haye, P. (2025). Room temperature sputtered silicon nitride microcombs and real-Time Hz-level tunable laser spectroscopy. In Ivo Rendina, Lucia Petti, Domenico Sagnelli, Giuseppe Nenna (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. Prague, CZE: SPIE.
MLA:
Bi, Toby, et al. "Room temperature sputtered silicon nitride microcombs and real-Time Hz-level tunable laser spectroscopy." Proceedings of the Smart Materials for Opto-Electronic Applications 2025, Prague, CZE Ed. Ivo Rendina, Lucia Petti, Domenico Sagnelli, Giuseppe Nenna, SPIE, 2025.
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