NO2 detection via microwave-based gas sensor with SnO2 deposited by ALD
Grochala D, Karcz S, Paleczek A, Blajszczak L, Kocon M, Marszalek K, Kern S, Crisp R, Staszek K, Rydosz A (2025)
Publication Type: Conference contribution
Publication year: 2025
Publisher: Institute of Electrical and Electronics Engineers Inc.
Pages Range: 242-245
Conference Proceedings Title: 2025 16th German Microwave Conference, GeMiC 2025
Event location: Dresden, DEU
ISBN: 9783982039749
DOI: 10.23919/GeMiC64734.2025.10979063
Abstract
In this paper, the gas-sensing characteristics of the tin dioxide (SnO2) gas-sensitive layer, deposited by atomic layer deposition (ALD), in the microwave frequency range are presented and discussed. The microwave-based gas sensor was previously designed in the form of a meander-type transmission line working at 5.8 GHz with an eight-port reflectometer part and tested with several MOX films. At the same time, ALD has not been reported yet in microwave-based gas-sensing applications. The sensor was tested in the 0-10 ppm range of nitrogen dioxide at various relative humidity (RH) and operating temperatures (OT). The measured limit of detection (LOD) was as low as 0.05 ppm while the estimated LOD could reach 0.005 ppm. The obtained results can be used to further optimize the microwave-based sensing elements for various applications including gas sensors where high relative humidity levels are expected to exist.
Authors with CRIS profile
Selina Kern
Lehrstuhl für Chemistry of thin film materials
Ryan Crisp
Lehrstuhl für Chemistry of thin film materials
Involved external institutions
Poland (PL)How to cite
APA:
Grochala, D., Karcz, S., Paleczek, A., Blajszczak, L., Kocon, M., Marszalek, K.,... Rydosz, A. (2025). NO2 detection via microwave-based gas sensor with SnO2 deposited by ALD. In 2025 16th German Microwave Conference, GeMiC 2025 (pp. 242-245). Dresden, DEU: Institute of Electrical and Electronics Engineers Inc..
MLA:
Grochala, Dominik, et al. "NO2 detection via microwave-based gas sensor with SnO2 deposited by ALD." Proceedings of the 16th German Microwave Conference, GeMiC 2025, Dresden, DEU Institute of Electrical and Electronics Engineers Inc., 2025. 242-245.
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