Room-Temperature Sputtered Silicon Nitride for Soliton Microcombs
Zhang S, Bi T, Harder I, Ohletz O, Gannott F, Gumann A, Butzen E, Zhang Y, Hill L, Del’Haye P (2024)
Publication Type: Conference contribution
Publication year: 2024
Publisher: Optical Society of America
Conference Proceedings Title: Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides, BGPP 2024 in Proceedings Advanced Photonics Congress 2024 - Part of Optica Advanced Photonics Congress
Event location: Quebec City, QC, CAN
Abstract
We present ultralow-loss, high-thickness silicon nitride photonic circuits fabricated using room-temperature sputtering. After 800 °C annealing, we achieve propagation losses of 3.5 dB/m, enabling ring resonators with optical quality factors exceeding 10 million.
Involved external institutions
Germany (DE)How to cite
APA:
Zhang, S., Bi, T., Harder, I., Ohletz, O., Gannott, F., Gumann, A.,... Del’Haye, P. (2024). Room-Temperature Sputtered Silicon Nitride for Soliton Microcombs. In Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides, BGPP 2024 in Proceedings Advanced Photonics Congress 2024 - Part of Optica Advanced Photonics Congress. Quebec City, QC, CAN: Optical Society of America.
MLA:
Zhang, Shuangyou, et al. "Room-Temperature Sputtered Silicon Nitride for Soliton Microcombs." Proceedings of the 2024 Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides, BGPP 2024, Quebec City, QC, CAN Optical Society of America, 2024.
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