In situ, non-invasive novel measurement method for the determination of integrated waveguide losses

Hack M, Kugler B, Wanitzek M, Vijayan P, Schulze J, Oehme M (2024)

Publication Type: Conference contribution

Publication year: 2024

Publisher: SPIE

Book Volume: 13109

Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering

Event location: San Diego, CA US

ISBN: 9781510678781

DOI: 10.1117/12.3028025

Abstract

We demonstrate an in situ, non-invasive measurement method to ensure stable manufacturing and quality control of integrated waveguides. This method assumes that the scattered light from a waveguide is proportional to the propagating light inside the waveguide. Consequently, we can estimate the waveguide losses by measuring the scattered light along the waveguide. We compare this newly demonstrated measurement method with state-of-the-art methods, including Fabry-Perot interferometry, Mach-Zehnder Interferometry, ring resonator interferometry, and the cut-back method. To validate our measurement method's working principle, we fabricated multiple amorphous silicon waveguides and characterized them using both, the presented and the cut-back method. Both methods yielded comparable results, indicating losses of around 1 dB/cm. For further investigation, multiple measurements of the same sample were conducted, resulting in a standard deviation of 0.29 dB/cm to 0.60 dB/cm. These initial standard deviations are sufficient to verify the presented measurement method. However, we want to emphasize that the main source of these deviations is due to the used measurement setup, indicating that the method has potential for improvement. Nevertheless, we have demonstrated that an in situ, non-invasive measurement of integrated waveguide losses is possible.

Authors with CRIS profile

Jörg Schulze Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Universität Stuttgart DE Germany (DE)

How to cite

APA:

Hack, M., Kugler, B., Wanitzek, M., Vijayan, P., Schulze, J., & Oehme, M. (2024). In situ, non-invasive novel measurement method for the determination of integrated waveguide losses. In Nader Engheta, Mikhail A. Noginov, Nikolay I. Zheludev, Nikolay I. Zheludev (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. San Diego, CA, US: SPIE.

MLA:

Hack, Michael, et al. "In situ, non-invasive novel measurement method for the determination of integrated waveguide losses." Proceedings of the Metamaterials, Metadevices, and Metasystems 2024, San Diego, CA Ed. Nader Engheta, Mikhail A. Noginov, Nikolay I. Zheludev, Nikolay I. Zheludev, SPIE, 2024.

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