Low-Temperature Sputtered Ultralow-Loss Silicon Nitride for Integrated Photonics

Zhang S, Bi T, Harder I, Lohse O, Gannott F, Gumann A, Butzen E, Zhang Y, Del'Haye P (2024)


Publication Type: Conference contribution

Publication year: 2024

Publisher: Optical Society of America

Conference Proceedings Title: CLEO: Science and Innovations, CLEO: S and I 2024 in Proceedings CLEO 2024, Part of Conference on Lasers and Electro-Optics

Event location: Charlotte, NC, USA

Abstract

We demonstrate ultralow-loss, high-thickness silicon nitride waveguides and microresonators based on room-temperature sputtering. We reach propagation losses of 3.5 dB/m after 800 °C annealing, enabling ring resonators with optical quality factors >10 million.

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How to cite

APA:

Zhang, S., Bi, T., Harder, I., Lohse, O., Gannott, F., Gumann, A.,... Del'Haye, P. (2024). Low-Temperature Sputtered Ultralow-Loss Silicon Nitride for Integrated Photonics. In CLEO: Science and Innovations, CLEO: S and I 2024 in Proceedings CLEO 2024, Part of Conference on Lasers and Electro-Optics. Charlotte, NC, USA: Optical Society of America.

MLA:

Zhang, Shuangyou, et al. "Low-Temperature Sputtered Ultralow-Loss Silicon Nitride for Integrated Photonics." Proceedings of the CLEO: Science and Innovations in CLEO 2024, CLEO: S and I 2024 - Part of Conference on Lasers and Electro-Optics, Charlotte, NC, USA Optical Society of America, 2024.

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