Resolution of Virtual Depth Sectioning from Four-Dimensional Scanning Transmission Electron Microscopy

Terzoudis-Lumsden EW, Petersen TC, Brown HG, Pelz P, Ophus C, Findlay SD (2023)

Publication Type: Journal article

Publication year: 2023

Journal

Microscopy and Microanalysis Cambridge University Press (CUP)

Book Volume: 29

Pages Range: 1409-1421

Journal Issue: 4

DOI: 10.1093/micmic/ozad068

Abstract

One approach to three-dimensional structure determination using the wealth of scattering data in four-dimensional (4D) scanning transmission electron microscopy (STEM) is the parallax method proposed by Ophus et al. (2019. Advanced phase reconstruction methods enabled by 4D scanning transmission electron microscopy, Microsc Microanal25, 10-11), which determines the scattering matrix and uses it to synthesize a virtual depth-sectioning reconstruction of the sample structure. Drawing on an equivalence with a hypothetical confocal imaging mode, we derive contrast transfer and point spread functions for this parallax method applied to weakly scattering objects, showing them identical to earlier depth-sectioning STEM modes when only bright field signal is used, but that improved depth resolution is possible if dark field signal can be used. Through a simulation-based study of doped Si, we show that this depth resolution is preserved for thicker samples, explore the impact of shot noise on the parallax reconstructions, discuss challenges to making use of dark field signal, and identify cases where the interpretation of the parallax reconstruction breaks down.

Authors with CRIS profile

Philipp Pelz Professur für Werkstoffwissenschaften (Computational Materials Microscopy)

Involved external institutions

The University of Melbourne AU Australia (AU) Monash University AU Australia (AU) Lawrence Berkeley National Laboratory (LBNL) US United States (USA) (US)

How to cite

APA:

Terzoudis-Lumsden, E.W., Petersen, T.C., Brown, H.G., Pelz, P., Ophus, C., & Findlay, S.D. (2023). Resolution of Virtual Depth Sectioning from Four-Dimensional Scanning Transmission Electron Microscopy. Microscopy and Microanalysis, 29(4), 1409-1421. https://dx.doi.org/10.1093/micmic/ozad068

MLA:

Terzoudis-Lumsden, E. W.C., et al. "Resolution of Virtual Depth Sectioning from Four-Dimensional Scanning Transmission Electron Microscopy." Microscopy and Microanalysis 29.4 (2023): 1409-1421.

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