Antireflection coatings for strongly curved glass lenses by atomic layer deposition

Pfeiffer K, Schulz U, Tuennermann A, Szeghalmi A (2017)

Publication Type: Journal article

Publication year: 2017

Journal

Coatings MDPI

Book Volume: 7

Article Number: 118

Journal Issue: 8

DOI: 10.3390/coatings7080118

Abstract

Antireflection (AR) coatings are indispensable in numerous optical applications and are increasingly demanded on highly curved optical components. In this work, optical thin films of SiO 2 , Al 2 O 3 , TiO 2 and Ta 2 O 5 were prepared by atomic layer deposition (ALD), which is based on self-limiting surface reactions leading to a uniform film thickness on arbitrarily shaped surfaces. Al 2 O 3 /TiO 2 /SiO 2 and Al 2 O 3 /Ta 2 O 5 /SiO 2 AR coatings were successfully applied in the 400-750 nm and 400-700 nm spectral range, respectively. Less than 0.6% reflectance with an average of 0.3% has been measured on a fused silica hemispherical (half-ball) lens with 4 mm diameter along the entire lens surface at 0° angle of incidence. The reflectance on a large B270 aspherical lens with height of 25 mm and diameter of 50 mm decreased to less than 1% with an average reflectance < 0.3%. The results demonstrate that ALD is a promising technology for deposition of uniform optical layers on strongly curved lenses without complex in situ thickness monitoring.

Involved external institutions

Friedrich-Schiller-Universität Jena DE Germany (DE) Fraunhofer-Institut für Angewandte Optik und Feinmechanik (IOF) / Fraunhofer Institute for Applied Optics and Precision Engineering DE Germany (DE)

How to cite

APA:

Pfeiffer, K., Schulz, U., Tuennermann, A., & Szeghalmi, A. (2017). Antireflection coatings for strongly curved glass lenses by atomic layer deposition. Coatings, 7(8). https://doi.org/10.3390/coatings7080118

MLA:

Pfeiffer, Kristin, et al. "Antireflection coatings for strongly curved glass lenses by atomic layer deposition." Coatings 7.8 (2017).

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