Influence of seed layers on the reflectance of sputtered aluminum thin films

Schmitt P, Stempfhuber S, Felde N, Szeghalmi A, Kaiser N, Tuennermann A, Schwinde S (2021)

Publication Type: Journal article

Publication year: 2021

Journal

Optics Express Optical Society of America

Book Volume: 29

Pages Range: 19472-19485

Journal Issue: 13

DOI: 10.1364/OE.428343

Abstract

The fabrication of highly reflective aluminum coatings is still an important part of current research due to their high intrinsic reflectivity in a broad spectral range. By using thin seed layers of Cu, CuOx, Cr, CrOx, Au, and Ag, the morphology of sputtered (unprotected) aluminum layers and, consequently, their reflectance can be influenced. In this long-term study, the reflectance behavior was measured continuously using spectrophotometry. Particular seed layer materials enhance the reflectance of aluminum coatings significantly and reduce their long-term degradation. Combining such seed layers with evaporation processes and suitable protective layers could further increase the reflectance of aluminum coatings.

Involved external institutions

Fraunhofer-Institut für Angewandte Optik und Feinmechanik (IOF) / Fraunhofer Institute for Applied Optics and Precision Engineering DE Germany (DE)

How to cite

APA:

Schmitt, P., Stempfhuber, S., Felde, N., Szeghalmi, A., Kaiser, N., Tuennermann, A., & Schwinde, S. (2021). Influence of seed layers on the reflectance of sputtered aluminum thin films. Optics Express, 29(13), 19472-19485. https://dx.doi.org/10.1364/OE.428343

MLA:

Schmitt, Paul, et al. "Influence of seed layers on the reflectance of sputtered aluminum thin films." Optics Express 29.13 (2021): 19472-19485.

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