Direct growth of monolayer MoS2on nanostructured silicon waveguides

Kuppadakkath A, Najafidehaghani E, Gan Z, Tuniz A, Gia Quyet Ngo , Knopf H, Loechner FJF, Abtahi F, Bucher T, Shradha S, Kaesebier T, Palomba S, Felde N, Paul P, Ullsperger T, Schroeder S, Szeghalmi A, Pertsch T, Staude I, Zeitner U, George A, Turchanin A, Eilenberger F (2022)

Publication Type: Journal article

Publication year: 2022

Journal

Nanophotonics De Gruyter Open

DOI: 10.1515/nanoph-2022-0235

Abstract

We report for the first time the direct growth of molybdenum disulfide (MoS2) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth of 2D material on nanostructures rectifies many drawbacks of the transfer-based approaches. We show that the van der Waals material grow conformally across the curves, edges, and the silicon-SiO2 interface of the waveguide structure. Here, the waveguide structure used as a growth substrate is complex not just in terms of its geometry but also due to the two materials (Si and SiO2) involved. A transfer-free method like this yields a novel approach for functionalizing nanostructured, integrated optical architectures with an optically active direct semiconductor.

Involved external institutions

Friedrich-Schiller-Universität Jena DE Germany (DE) University of Sydney (USYD) AU Australia (AU) Fraunhofer-Institut für Angewandte Optik und Feinmechanik (IOF) / Fraunhofer Institute for Applied Optics and Precision Engineering DE Germany (DE)

How to cite

APA:

Kuppadakkath, A., Najafidehaghani, E., Gan, Z., Tuniz, A., Gia Quyet Ngo, ., Knopf, H.,... Eilenberger, F. (2022). Direct growth of monolayer MoS2on nanostructured silicon waveguides. Nanophotonics. https://doi.org/10.1515/nanoph-2022-0235

MLA:

Kuppadakkath, Athira, et al. "Direct growth of monolayer MoS2on nanostructured silicon waveguides." Nanophotonics (2022).

BibTeX: Download