Multi-purpose high-resolution nanoscale table-top ptychography at 13.5 nm

Liu C, Eschen W, Loetgering L, Schuster V, Klas R, Kirsche A, Berthold L, Iliou A, Steinert M, Pertsch T, Hillmann F, Krause M, Limpert J, Rothhardt J (2022)

Publication Type: Conference contribution

Publication year: 2022

Publisher: Optica Publishing Group (formerly OSA)

Conference Proceedings Title: Optics InfoBase Conference Papers

Event location: Vancouver, BC, CAN

ISBN: 9781557528209

Abstract

We present our latest results on table-top ptychographic imaging at 13.5 nm. An overview and the identification of interesting areas are achieved with infrared illumination. XUV illumination provides sub-20-nm-resolution amplitude- and phase images.

Involved external institutions

Helmholtz-Institut Jena (HI-Jena) / Helmholtz Institute Jena DE Germany (DE) Fraunhofer-Institut für Mikrostruktur von Werkstoffen und Systemen IMWS DE Germany (DE) Leibniz-Institut für Naturstoff-Forschung und Infektionsbiologie (Hans-Knöll-Institut (HKI)) / Leibniz Institute for Natural Product Research and Infection Biology DE Germany (DE) Friedrich-Schiller-Universität Jena DE Germany (DE)

How to cite

APA:

Liu, C., Eschen, W., Loetgering, L., Schuster, V., Klas, R., Kirsche, A.,... Rothhardt, J. (2022). Multi-purpose high-resolution nanoscale table-top ptychography at 13.5 nm. In Optics InfoBase Conference Papers. Vancouver, BC, CAN: Optica Publishing Group (formerly OSA).

MLA:

Liu, C., et al. "Multi-purpose high-resolution nanoscale table-top ptychography at 13.5 nm." Proceedings of the Computational Optical Sensing and Imaging, COSI 2022, Vancouver, BC, CAN Optica Publishing Group (formerly OSA), 2022.

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