Perspective on ultrashort pulse laser micromachining

Tuennermann A, Momma C, Nolte S (2023)

Publication Type: Journal article

Publication year: 2023

Journal

Applied Physics A: Materials Science and Processing Springer Verlag (Germany)

Book Volume: 129

Article Number: 157

Journal Issue: 2

DOI: 10.1007/s00339-023-06403-9

Abstract

Ultrashort pulse lasers have found widespread applications in precise micromachining. Here, we present our brief perspective on the development of this innovative technology from the 1990s until today.

Involved external institutions

Friedrich-Schiller-Universität Jena DE Germany (DE) CORTRONIK GmbH DE Germany (DE)

How to cite

APA:

Tuennermann, A., Momma, C., & Nolte, S. (2023). Perspective on ultrashort pulse laser micromachining. Applied Physics A: Materials Science and Processing, 129(2). https://doi.org/10.1007/s00339-023-06403-9

MLA:

Tuennermann, Andreas, Carsten Momma, and Stefan Nolte. "Perspective on ultrashort pulse laser micromachining." Applied Physics A: Materials Science and Processing 129.2 (2023).

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