Preparation and microcontact printing of platinum and palladium thin films

Wisser FM, Schumm B, Meier A, Engel T, Grothe J, Kickelbick G, Kaskel S (2013)

Publication Type: Journal article, Original article

Publication year: 2013

Journal

Journal of Materials Chemistry C Royal Society of Chemistry

Book Volume: 1

Pages Range: 2477-2484

Journal Issue: 13

DOI: 10.1039/c3tc00826f

Abstract

Thin palladium and platinum films were prepared using a polymeric precursor method. For the first time, down to 30 nm thick films were achieved by this method. A precursor solution consisting of ethylene glycol, citric acid, a metal salt and the corresponding acid was deposited by spin coating onto various substrates. The thermal decomposition behavior of these precursors was characterized by thermal analysis methods. Dried and calcined films were characterized by XRD, UV-Vis and IR spectroscopy as well as resistance measurements to get more information about the film formation. The specific resistance of the phase pure platinum films was as low as 1.1 × 10 -7 Ω m and that of the palladium films was as low as 6.0 × 10-7 Ω m. In addition, a platinum precursor was used for microcontact printing. Regular line patterns with widths between 800 nm and 15 μm were achieved, as could be shown by AFM and SEM. © The Royal Society of Chemistry 2013.

Authors with CRIS profile

Florian Wisser

Involved external institutions

Technische Universität Dresden DE Germany (DE) Universität des Saarlandes (UdS) DE Germany (DE)

How to cite

APA:

Wisser, F.M., Schumm, B., Meier, A., Engel, T., Grothe, J., Kickelbick, G., & Kaskel, S. (2013). Preparation and microcontact printing of platinum and palladium thin films. Journal of Materials Chemistry C, 1(13), 2477-2484. https://doi.org/10.1039/c3tc00826f

MLA:

Wisser, Florian M., et al. "Preparation and microcontact printing of platinum and palladium thin films." Journal of Materials Chemistry C 1.13 (2013): 2477-2484.

BibTeX: Download