Confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests

Piwko M, Althues H, Schumm B, Kaskel S (2015)

Publication Type: Journal article

Publication year: 2015

Journal

Coatings MDPI

Book Volume: 5

Pages Range: 477-487

Journal Issue: 3

DOI: 10.3390/coatings5030477

Abstract

Confocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a height resolution down to 15 nm. The advantages of confocal microscopy, compared to scanning electron microscopy (SEM), are demonstrated by investigating the growth kinetics of VACNT using Al 2 O 3 buffer layers with varying thicknesses. A process optimization using confocal microscopy for fast VACNT forest height evaluation is presented.

Involved external institutions

Fraunhofer-Institut für Werkstoff- und Strahltechnik (IWS) / Fraunhofer Institute for Material and Beam Technology DE Germany (DE)

How to cite

APA:

Piwko, M., Althues, H., Schumm, B., & Kaskel, S. (2015). Confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests. Coatings, 5(3), 477-487. https://doi.org/10.3390/coatings5030477

MLA:

Piwko, Markus, et al. "Confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests." Coatings 5.3 (2015): 477-487.

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