Sharp MIR plasmonic modes in gratings made of heavily doped pulsed laser-melted Ge1-xSnx

Berkmann F, Steuer O, Ganss F, Prucnal S, Schwarz D, Fischer IA, Schulze J (2023)

Publication Type: Journal article

Publication year: 2023

Journal

Optical Materials Express Optical Society of America

Book Volume: 13

Pages Range: 752-763

Journal Issue: 3

DOI: 10.1364/OME.479637

Abstract

Plasmonic structures made out of highly doped group-IV semiconductor materials are of large interest for the realization of fully integrated mid-infrared (MIR) devices. Utilizing highly doped Ge1-xSnx alloys grown on Si substrates is one promising route to enable device operation at near-infrared (NIR) wavelengths. Due to the lower effective mass of electrons in Sn compared to Ge, the incorporation of Sn can potentially lower the plasma wavelength of Ge1-xSnx alloys compared to that of pure Ge. However, defects introduced by the large lattice mismatch to Si substrates as well as the introduction of alloy scattering limit device applications in practice. Here, we investigate pulsed laser melting as one strategy to increase material quality in highly doped Ge1-xSnx alloys. We show that a pulsed laser melting treatment of our Ge1-xSnx films not only serves to lower the material's plasma frequency but also leads to an increase in active dopant concentration. We demonstrate the application of this material in plasmonic gratings with sharp optical extinction peaks at MIR wavelengths.

Authors with CRIS profile

Jörg Schulze Lehrstuhl für Elektronische Bauelemente

Additional Organisation(s)

FAU Profilzentrum Licht.Materie.Quantentechnologien (FAU LMQ)

Involved external institutions

Universität Stuttgart DE Germany (DE) Helmholtz-Zentrum Dresden-Rossendorf (HZDR) DE Germany (DE) Brandenburgische Technische Universität Cottbus-Senftenberg (BTU) DE Germany (DE)

How to cite

APA:

Berkmann, F., Steuer, O., Ganss, F., Prucnal, S., Schwarz, D., Fischer, I.A., & Schulze, J. (2023). Sharp MIR plasmonic modes in gratings made of heavily doped pulsed laser-melted Ge1-xSnx. Optical Materials Express, 13(3), 752-763. https://dx.doi.org/10.1364/OME.479637

MLA:

Berkmann, F., et al. "Sharp MIR plasmonic modes in gratings made of heavily doped pulsed laser-melted Ge1-xSnx." Optical Materials Express 13.3 (2023): 752-763.

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