Embedded ultrasound sensor in a silicon-on-insulator photonic platform

Rosenthal A, Omar M, Estrada H, Kellnberger S, Razansky D, Ntziachristos V (2014)

Publication Type: Journal article

Publication year: 2014

Journal

Applied Physics Letters American Institute of Physics (AIP)

Book Volume: 104

Article Number: 021116

Journal Issue: 2

DOI: 10.1063/1.4860983

Abstract

A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves. © 2014 AIP Publishing LLC.

Involved external institutions

Technische Universität München (TUM) DE Germany (DE)

How to cite

APA:

Rosenthal, A., Omar, M., Estrada, H., Kellnberger, S., Razansky, D., & Ntziachristos, V. (2014). Embedded ultrasound sensor in a silicon-on-insulator photonic platform. Applied Physics Letters, 104(2). https://doi.org/10.1063/1.4860983

MLA:

Rosenthal, Amir, et al. "Embedded ultrasound sensor in a silicon-on-insulator photonic platform." Applied Physics Letters 104.2 (2014).

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