AFM-based pick-and-place handling of individual nanoparticles inside an SEM for the fabrication of plasmonic nano-patterns

Mick U, Banzer P, Christiansen S, Leuchs G (2014)

Publication Type: Conference contribution

Publication year: 2014

Publisher: Optical Society of America (OSA)

Conference Proceedings Title: Optics InfoBase Conference Papers

Event location: USA

ISBN: 9781557529992

DOI: 10.1364/cleo_si.2014.stu1h.1

Abstract

Integrating AFM technology into an SEM enables the interactive assembling of individual nanoparticles by in-situ pick-and-place handling. We present a hardware setup and introduce examples for the nanofabrication of plasmonic patterns. © 2014 OSA.

Authors with CRIS profile

Gerhard Leuchs

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light DE Germany (DE)

How to cite

APA:

Mick, U., Banzer, P., Christiansen, S., & Leuchs, G. (2014). AFM-based pick-and-place handling of individual nanoparticles inside an SEM for the fabrication of plasmonic nano-patterns. In Optics InfoBase Conference Papers. USA: Optical Society of America (OSA).

MLA:

Mick, Uwe, et al. "AFM-based pick-and-place handling of individual nanoparticles inside an SEM for the fabrication of plasmonic nano-patterns." Proceedings of the CLEO: Science and Innovations, CLEO_SI 2014, USA Optical Society of America (OSA), 2014.

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