Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes

Hardt E, Chavarin CA, Gruessing S, Flesch J, Skibitzki O, Spirito D, Vita GM, Simone GD, Masi AD, You C, Witzigmann B, Piehler J, Capellini G (2022)


Publication Type: Journal article

Publication year: 2022

Journal

Book Volume: 30

Pages Range: 40265-40276

Journal Issue: 22

DOI: 10.1364/OE.469496

Abstract

The development of a CMOS manufactured THz sensing platform could enable the integration of state-of-the-art sensing principles with the mixed signal electronics ecosystem in small footprint, low-cost devices. To this aim, in this work we demonstrate a label-free protein sensing platform using highly doped germanium plasmonic antennas realized on Si and SOI substrates and operating in the THz range of the electromagnetic spectrum. The antenna response to different concentrations of BSA shows in both cases a linear response with saturation above 20 mg/mL. Ge antennas on SOI substrates feature a two-fold sensitivity as compared to conventional Si substrates, reaching a value of 6 GHz/(mg/mL), which is four-fold what reported using metal-based metamaterials. We believe that this result could pave the way to a low-cost lab-on-a-chip biosensing platform.

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How to cite

APA:

Hardt, E., Chavarin, C.A., Gruessing, S., Flesch, J., Skibitzki, O., Spirito, D.,... Capellini, G. (2022). Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes. Optics Express, 30(22), 40265-40276. https://dx.doi.org/10.1364/OE.469496

MLA:

Hardt, Elena, et al. "Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes." Optics Express 30.22 (2022): 40265-40276.

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