Rapid thermal annealing of Sb2Te3 thin films grown via atomic layer deposition

Tynell T, Geishendorf K, Piontek S, Komossa T, Schulz S, Nielsch K, Thomas A (2020)

Publication Type: Journal article

Publication year: 2020

Journal

Thin Solid Films Elsevier

Book Volume: 700

Article Number: 137922

DOI: 10.1016/j.tsf.2020.137922

Involved external institutions

Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e.V. (IFW) / Leibniz Institute for Solid State and Materials Research Dresden DE Germany (DE) Universität Duisburg-Essen (UDE) DE Germany (DE)

How to cite

APA:

Tynell, T., Geishendorf, K., Piontek, S., Komossa, T., Schulz, S., Nielsch, K., & Thomas, A. (2020). Rapid thermal annealing of Sb2Te3 thin films grown via atomic layer deposition. Thin Solid Films, 700. https://doi.org/10.1016/j.tsf.2020.137922

MLA:

Tynell, Tommi, et al. "Rapid thermal annealing of Sb2Te3 thin films grown via atomic layer deposition." Thin Solid Films 700 (2020).

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