Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system

Wu Y, Wirthmann E, Klöpzig U, Hausotte T (2021)

Publication Language: English

Publication Type: Journal article, Original article

Publication year: 2021

Journal

Journal of Sensors and Sensor Systems Copernicus Publications

Pages Range: 171-177

Journal Issue: 10

DOI: 10.5194/jsss-10-171-2021

Open Access Link: https://jsss.copernicus.org/articles/10/171/2021/

Authors with CRIS profile

Yiting Wu Lehrstuhl für Fertigungsmesstechnik Elisa Wirthmann Lehrstuhl für Fertigungsmesstechnik Ute Klöpzig Lehrstuhl für Fertigungsmesstechnik Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

How to cite

APA:

Wu, Y., Wirthmann, E., Klöpzig, U., & Hausotte, T. (2021). Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system. Journal of Sensors and Sensor Systems, 10, 171-177. https://dx.doi.org/10.5194/jsss-10-171-2021

MLA:

Wu, Yiting, et al. "Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system." Journal of Sensors and Sensor Systems 10 (2021): 171-177.

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