Fabrication of GepB-alloys by means of pulsed laser induced epitaxy
Weiser MC, Schwarz D, Funk HS, Weißhaupt D, Serra C, Schulze J, Chiussi S (2019)
Publication Type: Conference contribution
Publication year: 2019
Publisher: Institute of Electrical and Electronics Engineers Inc.
Pages Range: 1-6
Conference Proceedings Title: 2019 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2019 - Proceedings
Event location: Opatija
ISBN: 9789532330984
DOI: 10.23919/MIPRO.2019.8756640
Abstract
Theoretical simulations predict that direct band transitions are favored in Germanium-Lead (GePb) alloys with Pb concentrations of cPb I 3.4%. This could enable the creation of semiconductor lasers that are directly structured on Ge substrates. However, the formation of alloys with these properties is hindered by the low equilibrium solubility of Pb in Ge. Therefore, the usage of out-of-equilibrium growth methods, such as pulsed laser induced epitaxy (PLIE), is necessary. The contribution focusses on the formation of GePb alloys with varying Pb concentrations. To cover a wide range of Pb concentrations, pulsed laser deposition (PLD) was utilized to deposit thin and smooth Pb films of varying thicknesses on Ge samples. After deposition, PLIE was used for alloying. For both processes, an Argon-fluoride (ArF) excimer laser emitting radiation at a wavelength of ? = 193 nm was used. The quality of the resulting alloys is evaluated by using Raman spectroscopy and the impact of different process parameters of PLIE is discussed.
Involved external institutions
Spain (ES)
Germany (DE)How to cite
APA:
Weiser, M.C., Schwarz, D., Funk, H.S., Weißhaupt, D., Serra, C., Schulze, J., & Chiussi, S. (2019). Fabrication of GepB-alloys by means of pulsed laser induced epitaxy. In Marko Koricic, Zeljko Butkovic, Karolj Skala, Zeljka Car, Marina Cicin-Sain, Snjezana Babic, Vlado Sruk, Dejan Skvorc, Slobodan Ribaric, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Predrag Pale, Darko Huljenic, Tihana Galinac Grbac, Matej Janjic (Eds.), 2019 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2019 - Proceedings (pp. 1-6). Opatija, HU: Institute of Electrical and Electronics Engineers Inc..
MLA:
Weiser, M. C.J., et al. "Fabrication of GepB-alloys by means of pulsed laser induced epitaxy." Proceedings of the 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2019, Opatija Ed. Marko Koricic, Zeljko Butkovic, Karolj Skala, Zeljka Car, Marina Cicin-Sain, Snjezana Babic, Vlado Sruk, Dejan Skvorc, Slobodan Ribaric, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Predrag Pale, Darko Huljenic, Tihana Galinac Grbac, Matej Janjic, Institute of Electrical and Electronics Engineers Inc., 2019. 1-6.
BibTeX: Download