Dettling MM, Weibhaupt D, Funk HS, Kern M, Berkmann F, Clausen C, Oehme M, Schwarz D, Slageren JV, Schulze J (2020)
Publication Type: Conference contribution
Publication year: 2020
Publisher: Institute of Electrical and Electronics Engineers Inc.
Pages Range: 17-21
Conference Proceedings Title: 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings
ISBN: 9789532330991
DOI: 10.23919/MIPRO48935.2020.9245273
This work reports on the carrier mobilities in heavily doped, pseudomorphically grown Ge1-xSnx-epilayers with Sn-concentrations up to 9.2%. For this purpose, Ge1-xSnx-alloys were grown on a relaxed Ge virtual substrate on top of a commercial Si (100) wafer using molecular beam epitaxy. The crystal structure and quality of the Ge1-xSnx-epilayers were analyzed by high-resolution X-ray diffraction. In order to extract the carrier mobilities in Ge1-xSnx, low temperature hall measurements were carried out, using a Van-der-Pauw-geometry. It is shown that with increasing Sn-concentration we find a decrease in carrier mobility, which corresponds to an increasing sheetresistance.
APA:
Dettling, M.M., Weibhaupt, D., Funk, H.S., Kern, M., Berkmann, F., Clausen, C.,... Schulze, J. (2020). Carrier mobilities in heavily doped pseudomorphic Ge1-x Snx-epilayers. In Marko Koricic, Karolj Skala, Zeljka Car, Marina Cicin-Sain, Vlado Sruk, Dejan Skvorc, Slobodan Ribaric, Bojan Jerbic, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Tihomir Katulic, Predrag Pale, Tihana Galinac Grbac, Nikola Filip Fijan, Adrian Boukalov, Dragan Cisic, Vera Gradisnik (Eds.), 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings (pp. 17-21). Opatija, HU: Institute of Electrical and Electronics Engineers Inc..
MLA:
Dettling, M. M., et al. "Carrier mobilities in heavily doped pseudomorphic Ge1-x Snx-epilayers." Proceedings of the 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020, Opatija Ed. Marko Koricic, Karolj Skala, Zeljka Car, Marina Cicin-Sain, Vlado Sruk, Dejan Skvorc, Slobodan Ribaric, Bojan Jerbic, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Tihomir Katulic, Predrag Pale, Tihana Galinac Grbac, Nikola Filip Fijan, Adrian Boukalov, Dragan Cisic, Vera Gradisnik, Institute of Electrical and Electronics Engineers Inc., 2020. 17-21.
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