Schaude J, Hausotte T (2021)
Publication Language: English
Publication Type: Conference contribution, Conference Contribution
Publication year: 2021
Conference Proceedings Title: euspen's 21st International Conference & Exhibition
Event location: Copenhagen, DK
URI: https://www.euspen.eu/knowledge-base/ICE21114.pdf
The article presents measurements with an atomic force microscope (AFM) with an adjustable probe direction integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. Therefore, the long-term measurement precision of the setup and its sensitivity to thermal variations is investigated within a thermostating housing with a long-term temperature stability of 17 mK. On the other hand, the thermostating housing necessitates long signal paths, as the signal processing units are located outside of it. Therefore, the short-term measurement precision is determined by repeated calibrations of the AFM against the traceable z-interferometer of the NMM-1 and the z-noise is determined by standstill measurements. Furthermore, the tilting-capacity of the AFM is applied for repeated measurements of a calibration grating with a nominal step height of (21.4 ±1.5) nm. It is measured while placed within the xy-plane of the NMM-1 and while tilted to this plane with the probe direction adjusted accordingly. The determined mean step heights for both positions of the grating with 21.42 nm and 21.18 nm and standard deviations in the double-digit pm-range agree well with the nominal step height. Furthermore, the noise-level and the short-term measurement precision are in the low single-digit nm-range. Nevertheless, the empirically determined thermal sensitivity of the sensor is about 1.3 nm/mK.
APA:
Schaude, J., & Hausotte, T. (2021). Investigations on the measurement precision of an atomic force microscope with an adjustable probe direction. In euspen's 21st International Conference & Exhibition. Copenhagen, DK.
MLA:
Schaude, Janik, and Tino Hausotte. "Investigations on the measurement precision of an atomic force microscope with an adjustable probe direction." Proceedings of the euspen's 21st International Conference & Exhibition, Copenhagen, DK 2021.
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