A metrological atomic force microscope for large range measurements with sub-nanometre resolution

Wu Y, Wirthmann E, Klöpzig U, Hausotte T (2021)

Publication Type: Conference contribution, Original article

Publication year: 2021

Event location: Nürnberg

URI: https://www.ama-science.org/proceedings/details/3942

DOI: 10.5162/SMSI2021/A4.1

Authors with CRIS profile

Yiting Wu Lehrstuhl für Fertigungsmesstechnik Elisa Wirthmann Lehrstuhl für Fertigungsmesstechnik Ute Klöpzig Lehrstuhl für Fertigungsmesstechnik Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

How to cite

APA:

Wu, Y., Wirthmann, E., Klöpzig, U., & Hausotte, T. (2021). A metrological atomic force microscope for large range measurements with sub-nanometre resolution. In AMA Service GmbH (Eds.), Proceedings of the Sensor and Measurement Science International 2021. Nürnberg.

MLA:

Wu, Yiting, et al. "A metrological atomic force microscope for large range measurements with sub-nanometre resolution." Proceedings of the Sensor and Measurement Science International 2021, Nürnberg Ed. AMA Service GmbH, 2021.

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