Applicability of focused Ion beam (FIB) milling with gallium, neon, and xenon to the fracture toughness characterization of gold thin films

Preiß E, Merle B, Xiao Y, Gannott F, Liebig JP, Wheeler JM, Göken M (2021)

Publication Type: Journal article

Publication year: 2021

Journal

Journal of Materials Research Springer / Materials Research Society

URI: https://link.springer.com/content/pdf/10.1557/s43578-020-00045-w.pdf

DOI: 10.1557/s43578-020-00045-w

Open Access Link: https://link.springer.com/content/pdf/10.1557/s43578-020-00045-w.pdf

Abstract

Abstract: Focused ion beam (FIB) milling is an increasingly popular technique for fabricating micro-sized samples for nanomechanical characterization. Previous investigations have cautioned that exposure to a gallium ion beam can significantly alter the mechanical behavior of materials. In the present study, the effects of gallium, neon, and xenon ions are scrutinized. We demonstrate that fracture toughness measurements on freestanding gold thin films are unaffected by the choice of the ion species and milling parameters. This is likely because the crack initiation is controlled by the local microstructure and grain boundaries at the notch, rather than by the damaged area introduced by FIB milling. Additionally, gold is not susceptible to chemical embrittlement by common FIB ion species. This confirms the validity of microscale fracture measurements based on similar experimental designs. Graphical abstract: [Figure not available: see fulltext.].

Authors with CRIS profile

Eva Preiß Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Benoit Merle Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Jan Philipp Liebig Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Mathias Göken Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Additional Organisation(s)

Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM) Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Related research project(s)

Mechanical properties and fracture behavior of thin layers (GRK1896-B3) In-situ Characterization of Nanomaterials with Electrons, X-rays/Neutrons and Scanning Probes (GRK 1896) Oct. 1, 2013 - Sept. 30, 2022 In-situ nanomechanics and FIB tomography of thin films (EXC315 EAM (A2-3)) Exzellenz-Cluster Engineering of Advanced Materials Nov. 1, 2012 - Oct. 31, 2017

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light DE Germany (DE) Eidgenössische Technische Hochschule Zürich (ETHZ) / Swiss Federal Institute of Technology in Zurich CH Switzerland (CH)

How to cite

APA:

Preiß, E., Merle, B., Xiao, Y., Gannott, F., Liebig, J.P., Wheeler, J.M., & Göken, M. (2021). Applicability of focused Ion beam (FIB) milling with gallium, neon, and xenon to the fracture toughness characterization of gold thin films. Journal of Materials Research. https://doi.org/10.1557/s43578-020-00045-w

MLA:

Preiß, Eva, et al. "Applicability of focused Ion beam (FIB) milling with gallium, neon, and xenon to the fracture toughness characterization of gold thin films." Journal of Materials Research (2021).

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