Proceedings of SPIE, Solutions for a further Miniaturization

Schmidt M, Otto A (2000)

Publication Type: Conference contribution

Publication year: 2000

Pages Range: 234-243

Conference Proceedings Title: Micromachining and Microfabrication Process Technology VI. Santa Clara, USA

Authors with CRIS profile

Michael Schmidt Lehrstuhl für Photonische Technologien (LPT)

Additional Organisation(s)

Institute of Manufacturing Technology (LFT)

Involved external institutions

Technische Universität Wien / Vienna University of Technology AT Austria (AT)

How to cite

APA:

Schmidt, M., & Otto, A. (2000). Proceedings of SPIE, Solutions for a further Miniaturization. In Karam, J.-M.; Yasaitis, J. (Eds.), Micromachining and Microfabrication Process Technology VI. Santa Clara, USA (pp. 234-243).

MLA:

Schmidt, Michael, and Andreas Otto. "Proceedings of SPIE, Solutions for a further Miniaturization." Proceedings of the Micromachining and Microfabrication Process Technology VI. Santa Clara, USA Ed. Karam, J.-M.; Yasaitis, J., 2000. 234-243.

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