Microprobe analysis of Pt films deposited by beam induced reaction

Park Y, Takai M, Lehrer C, Frey L, Ryssel H (1998)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1998

Journal

Japanese Journal of Applied Physics Japan Society of Applied Physics

Book Volume: 37

Pages Range: 7042-7046

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-4243307043&origin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Park, Y., Takai, M., Lehrer, C., Frey, L., & Ryssel, H. (1998). Microprobe analysis of Pt films deposited by beam induced reaction. Japanese Journal of Applied Physics, 37, 7042-7046.

MLA:

Park, Y., et al. "Microprobe analysis of Pt films deposited by beam induced reaction." Japanese Journal of Applied Physics 37 (1998): 7042-7046.

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