Additive fabrication of nanostructures with focused soft X-rays
Späth A, TU F, Vollnhals F, Drost M, Krick Calderon S, Watts B, Fink R, Marbach H (2016)
Publication Type: Journal article
Publication year: 2016
Journal
Book Volume: 6
Pages Range: 98344-98349
Journal Issue: 100
DOI: 10.1039/C6RA18214C
Abstract
We report on a novel technique for the fabrication of metallic nanostructures via soft X-ray irradiation of precursor molecules supplied from the gas phase. With this technique we were able to produce localized Co nanostructures with a growth rate and purity competitive with electron beam induced deposition. We demonstrate that our approach exhibits significant selectivity with respect to incident photon energy leading to enhanced growth for resonant absorption energy of the precursor molecule. Based on this finding we propose a unique new pathway of selective deposition from precursor mixtures. Furthermore, we investigated the growth rate with respect to precursor pressure and growth time and discuss the potential resolution limits of this new technique.
Authors with CRIS profile
Andreas Späth
Lehrstuhl für Physikalische Chemie II
Fan TU
Lehrstuhl für Physikalische Chemie II
Florian Vollnhals
Lehrstuhl für Physikalische Chemie II
Martin Drost
Lehrstuhl für Physikalische Chemie II
Sandra Krick Calderon
Lehrstuhl für Physikalische Chemie II
Rainer Fink
Professur für Physikalische Chemie
Hubertus Marbach
Lehrstuhl für Physikalische Chemie II
Additional Organisation(s)
Involved external institutions
Switzerland (CH)How to cite
APA:
Späth, A., TU, F., Vollnhals, F., Drost, M., Krick Calderon, S., Watts, B.,... Marbach, H. (2016). Additive fabrication of nanostructures with focused soft X-rays. RSC Advances, 6(100), 98344-98349. https://doi.org/10.1039/C6RA18214C
MLA:
Späth, Andreas, et al. "Additive fabrication of nanostructures with focused soft X-rays." RSC Advances 6.100 (2016): 98344-98349.
BibTeX: Download