Comparison of different sources for laboratory X-ray microscopy
Ebensperger T, Stahlhut P, Nachtrab F, Zabler S, Hanke R (2012)
Publication Type: Journal article
Publication year: 2012
Journal
Book Volume: 7
Article Number: C10008
Journal Issue: 10
DOI: 10.1088/1748-0221/7/10/C10008
Abstract
This paper describes the setup of two different solutions for laboratory X-ray microscopy working with geometric magnification. One setup uses thin-film transmission targets with an optimized tungsten-layer thickness and the electron gun and optics of an electron probe micro analyzer to generate a very small X-ray source. The other setup is based on a scanning electron microscope and uses microstructured reflection targets. We also describe the structuring process for these targets. In both cases we show that resolutions of 100~nm can be achieved. Also the possibilities of computed tomography for 3D imaging are explored and we show first imaging examples of high-absorption as well as low-absorption specimens to demonstrate the capabilities of the setups.
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Germany (DE)How to cite
APA:
Ebensperger, T., Stahlhut, P., Nachtrab, F., Zabler, S., & Hanke, R. (2012). Comparison of different sources for laboratory X-ray microscopy. Journal of Instrumentation, 7(10). https://dx.doi.org/10.1088/1748-0221/7/10/C10008
MLA:
Ebensperger, T., et al. "Comparison of different sources for laboratory X-ray microscopy." Journal of Instrumentation 7.10 (2012).
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