A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching

Liebig JP, Göken M, Richter G, Mackovic M, Przybilla T, Spiecker E, Pierron ON, Merle B (2016)

Publication Status: Published

Publication Type: Journal article

Publication year: 2016

Journal

Ultramicroscopy Elsevier

Publisher: ELSEVIER SCIENCE BV

Book Volume: 171

Pages Range: 82-88

DOI: 10.1016/j.ultramic.2016.09.004

Abstract

A new method for the preparation of freestanding thin film samples for mechanical testing in transmission electron microscopes is presented. It is based on a combination of focused ion beam.(FIB) milling and electron-beam-assisted etching with xenon difluoride (XeF2) precursor gas. The use of the FIB allows for the target preparation of microstructural defects and enables well-defined sample geometries which can be easily adapted in order to meet the requirements of various testing setups. In contrast to existing FIB-based preparation approaches, the area of interest is never exposed to ion beam irradiation which preserves a pristine microstructure. The method can be applied to a wide range of thin film material systems compatible with XeF2 etching. Its feasibility is demonstrated for gold and alloyed copper thin films and its practical application is discussed. (C) 2016 Elsevier B.V. All rights reserved.

Authors with CRIS profile

Jan Philipp Liebig Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Mathias Göken Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Mirza Mackovic Lehrstuhl für Werkstoffwissenschaften (Mikro- und Nanostrukturforschung) Thomas Przybilla Lehrstuhl für Werkstoffwissenschaften (Mikro- und Nanostrukturforschung) Erdmann Spiecker Lehrstuhl für Werkstoffwissenschaften (Mikro- und Nanostrukturforschung) Benoit Merle Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials (EAM) Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM) Graduiertenkolleg 1896/2 In situ Mikroskopie mit Elektronen, Röntgenstrahlen und Rastersonden Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Related research project(s)

Mechanical properties and fracture behavior of thin layers (GRK1896-B3) In-situ Characterization of Nanomaterials with Electrons, X-rays/Neutrons and Scanning Probes (GRK 1896) Oct. 1, 2013 - Sept. 30, 2022 In-situ nanomechanics and FIB tomography of thin films (EXC315 EAM (A2-3)) Exzellenz-Cluster Engineering of Advanced Materials Nov. 1, 2012 - Oct. 31, 2017

Involved external institutions

Max Planck Institute for Intelligent Systems (MPI-IS) / Max-Planck-Institut für Intelligente Systeme DE Germany (DE) Georgia Institute of Technology US United States (USA) (US)

How to cite

APA:

Liebig, J.P., Göken, M., Richter, G., Mackovic, M., Przybilla, T., Spiecker, E.,... Merle, B. (2016). A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching. Ultramicroscopy, 171, 82-88. https://doi.org/10.1016/j.ultramic.2016.09.004

MLA:

Liebig, Jan Philipp, et al. "A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching." Ultramicroscopy 171 (2016): 82-88.

BibTeX: Download