Model reduction for semiconductor inverse dopant profiling

Burger M (2003)

Publication Type: Conference contribution

Publication year: 2003

Edited Volumes: Proceedings of the 4th IMACS Symposium on Mathematical Modelling

Conference Proceedings Title: Proceedings of the 4th IMACS Symposium on Mathematical Modelling

Event location: Vienna

ISBN: 3-901608-24-9

Authors with CRIS profile

Martin Burger

Involved external institutions

Westfälische Wilhelms-Universität (WWU) Münster DE Germany (DE)

How to cite

APA:

Burger, M. (2003). Model reduction for semiconductor inverse dopant profiling. In Troch I, Breitenecker F (Eds.), Proceedings of the 4th IMACS Symposium on Mathematical Modelling. Vienna.

MLA:

Burger, Martin. "Model reduction for semiconductor inverse dopant profiling." Proceedings of the MATHMOD 03, 4th IMACS Symposium on Mathematical Modelling, Vienna Ed. Troch I, Breitenecker F, 2003.

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