Optimization models for semiconductor dopant profiling

Burger M (2006)

Publication Type: Conference contribution

Publication year: 2006

Publisher: Birkhäuser

Edited Volumes: Transport Phenomena and Kinetic Theory: Applications to Gases, Semiconductors, Photons, and Biological Systems

City/Town: Boston

Pages Range: 91-116

Conference Proceedings Title: Transport Phenomena and Kinetic Theory: Applications to Gases, Semiconductors, Photons, and Biological Systems

Event location: Mantova

DOI: 10.1007/978-0-8176-4554-0_5

Authors with CRIS profile

Martin Burger

Involved external institutions

Westfälische Wilhelms-Universität (WWU) Münster DE Germany (DE)

How to cite

APA:

Burger, M. (2006). Optimization models for semiconductor dopant profiling. In Cercignani C, Gabetta E (Eds.), Transport Phenomena and Kinetic Theory: Applications to Gases, Semiconductors, Photons, and Biological Systems (pp. 91-116). Mantova: Boston: Birkhäuser.

MLA:

Burger, Martin. "Optimization models for semiconductor dopant profiling." Proceedings of the Transport Phenomena and Kinetic Theory: Applications to Gases, Semiconductors, Photons, and Biological Systems, Mantova Ed. Cercignani C, Gabetta E, Boston: Birkhäuser, 2006. 91-116.

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