Laser focus positioning method with submicrometer accuracy

Alexeev I, Strauß J, Gröschl AC, Cvecek K, Schmidt M (2013)

Publication Language: English

Publication Type: Journal article, Online publication

Publication year: 2013


Publisher: Osa Optical Society of America

Book Volume: 52

Pages Range: 415-421

Journal Issue: 3

DOI: 10.1364/AO.52.000415


Accurate positioning of a sample is one of the primary challenges in laser micromanufacturing. There are a number of methods that allow detection of the surface position; however, only a few of them use the beam of the processing laser as a basis for the measurement. Those methods have an advantage that any changes in the processing laser beam can be inherently accommodated. This work describes a direct, contact-free method to accurately determine workpiece position with respect to the structuring laser beam focal plane based on nonlinear harmonic generation. The method makes workpiece alignment precise and time efficient due to ease of automation and provides the repeatability and accuracy of the surface detection of less than 1 μm.

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Alexeev, I., Strauß, J., Gröschl, A.C., Cvecek, K., & Schmidt, M. (2013). Laser focus positioning method with submicrometer accuracy. Applied Optics, 52(3), 415-421.


Alexeev, Ilya, et al. "Laser focus positioning method with submicrometer accuracy." Applied Optics 52.3 (2013): 415-421.

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