Processing of hollow micro- and nanostructures using the hydrophilic nature of MgO
Zolotaryov A, Bachmann J, Montero-Moreno JM, Pitzschel K, Nielsch K (2011)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 2011
Journal
Publisher: Elsevier
Book Volume: 35
Pages Range: 496-499
DOI: 10.1016/j.precisioneng.2011.03.005
Abstract
We show that covering the water-saturated MgO surface with an Al(2)O(3) film using atomic layer deposition and then annealing it at 400 degrees C leads to plastic deformation of alumina by trapped water vapor with consequent development of hollow structures. This phenomenon is applied to thin films, nanopatterned surfaces and isolated 3D nanostructures. (C) 2011 Elsevier Inc. All rights reserved.
Authors with CRIS profile
Involved external institutions
Germany (DE)How to cite
APA:
Zolotaryov, A., Bachmann, J., Montero-Moreno, J.M., Pitzschel, K., & Nielsch, K. (2011). Processing of hollow micro- and nanostructures using the hydrophilic nature of MgO. Precision Engineering-Journal of the International Societies For Precision Engineering and Nanotechnology, 35, 496-499. https://doi.org/10.1016/j.precisioneng.2011.03.005
MLA:
Zolotaryov, A., et al. "Processing of hollow micro- and nanostructures using the hydrophilic nature of MgO." Precision Engineering-Journal of the International Societies For Precision Engineering and Nanotechnology 35 (2011): 496-499.
BibTeX: Download