Shahmoon A, Strauß J, Zafri H, Schmidt M, Zalevsky Z (2016)
Publication Language: English
Publication Type: Journal article, Original article
Publication year: 2016
Book Volume: 83
Pages Range: 188-193
DOI: 10.1016/j.phpro.2016.08.153
Open Access Link: http://www.sciencedirect.com/science/article/pii/S1875389216302607
In this paper we present the fabrication procedure as well as the preliminary experimental results of a novel method for construction of high resolution nanometric interconnection lines. The fabrication procedure relies on a self-assembly process of gold nanoparticles at specific predetermined nanostructures. The nanostructures for the self-assembly process are based on the focused ion beam (FIB) or scanning electron beam (SEM) technology. The assembled nanoparticles are being illuminated using a picosecond laser with a wavelength of 532 nm. Different pulse energies have been investigated. The paper aimed at developing a novel and reliable process for fabrication of interconnection lines encompass three different disciplines, self-assembly of nanometric particles, optics and microelectronic.
APA:
Shahmoon, A., Strauß, J., Zafri, H., Schmidt, M., & Zalevsky, Z. (2016). High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles. Physics Procedia, 83, 188-193. https://doi.org/10.1016/j.phpro.2016.08.153
MLA:
Shahmoon, Asaf, et al. "High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles." Physics Procedia 83 (2016): 188-193.
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