Electro-optic and acousto-optic laser beam scanners

Heberle J, Bechtold P, Strauß J, Schmidt M (2016)

Publication Language: English

Publication Type: Conference contribution, Conference Contribution

Publication year: 2016

Publisher: SPIE

City/Town: Bellingham, WA

Pages Range: 97360L-1 - 97360L-10

Conference Proceedings Title: Laser-based Micro- and Nanoprocessing X, Proc. SPIE 9736

Event location: San Francisco US

ISBN: 9781628419719

DOI: 10.1117/12.2212208


Electro-optical deflectors (EOD) and acousto-optical deflectors (AOD) are based on deflection of laser light within a solid state medium. As they do not contain any moving parts, they yield advantages compared to mechanical scanners which are conventionally used for laser beam deflection. Even for arbitrary scan paths high feed rates can be achieved. In this work the principles of operation and characteristic properties of EOD and AOD are presented. Additionally, a comparison to mirror based mechanical deflectors regarding deflection angles, speed and accuracy is made in terms of resolvable spots and the rate of resolvable spots. Especially, the latter one is up to one order of magnitude higher for EOD and AOD systems compared to conventional systems. Further characteristic properties such as response time, damage threshold, efficiency and beam distortions are discussed. Solid state laser beam deflectors are usually characterized by small deflection angles but high angular deflection velocities. As mechanical deflectors exhibit opposite properties an arrangement of a mechanical scanner combined with a solid state deflector provides a solution with the benefits of both systems. As ultrashort pulsed lasers with average power above 100 W and repetition rates in the MHz range have been available for several years this approach can be applied to fully exploit their capabilities. Thereby, pulse overlap can be reduced and by this means heat affected zones are prevented to provide proper processing results. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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Heberle, J., Bechtold, P., Strauß, J., & Schmidt, M. (2016). Electro-optic and acousto-optic laser beam scanners. In Klotzbach, Udo; Washio, Kunihiko; Arnold, Craig B. (Eds.), Laser-based Micro- and Nanoprocessing X, Proc. SPIE 9736 (pp. 97360L-1 - 97360L-10). San Francisco, US: Bellingham, WA: SPIE.


Heberle, Johannes, et al. "Electro-optic and acousto-optic laser beam scanners." Proceedings of the SPIE LASE, San Francisco Ed. Klotzbach, Udo; Washio, Kunihiko; Arnold, Craig B., Bellingham, WA: SPIE, 2016. 97360L-1 - 97360L-10.

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