A micron-sized nanoporous multifunction sensing device

Moreno I Codinachs L, Birkenstock C, Garma T, Zierold R, Bachmann J, Nielsch K, Schoening MJ, Fontcuberta I Morral A (2009)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2009

Journal

physica status solidi (a) Wiley

Publisher: Wiley-VCH Verlag

Book Volume: 206

Pages Range: 435-441

DOI: 10.1002/pssa.200880472

Abstract

In this work, a capacitive sensor based on Anodic Aluminium Oxide (AAO) porous structures has been developed. In some cases, the pores have been also conformally coated with a high chemical pure SiO(2) by means of Atomic Layer Deposition (ALD). Temperature measurements have been done in DI water obtaining a response of 5 nF/degrees C. pH measurements have been performed and the responses obtained are between 0.2 and 1 nF/pH. The reproducibility of the sensors has been found to be high and a larger hysteresis effect has been observed in the samples with alumina pores rather than in the SiO(2) ones. The hysteresis seems to be related to the charging of the oxide upon application of a voltage. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Authors with CRIS profile

Julien Bachmann Lehrstuhl für Chemistry of thin film materials

Involved external institutions

Technische Universität München (TUM) DE Germany (DE) Universität Hamburg (UHH) DE Germany (DE) Fachhochschule Aachen - Aachen University of Applied Sciences DE Germany (DE)

How to cite

APA:

Moreno I Codinachs, L., Birkenstock, C., Garma, T., Zierold, R., Bachmann, J., Nielsch, K.,... Fontcuberta I Morral, A. (2009). A micron-sized nanoporous multifunction sensing device. physica status solidi (a), 206, 435-441. https://doi.org/10.1002/pssa.200880472

MLA:

Moreno I Codinachs, L., et al. "A micron-sized nanoporous multifunction sensing device." physica status solidi (a) 206 (2009): 435-441.

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