Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation

Rapp S, Heinrich G, Wollgarten M, Huber HP, Schmidt M (2015)

Publication Type: Journal article

Publication year: 2015

Journal

Journal of Applied Physics AIP Publishing

Publisher: American Institute of Physics (AIP)

Book Volume: 117

Pages Range: 105304

Journal Issue: 10

DOI: 10.1063/1.4914457

Authors with CRIS profile

Michael Schmidt Lehrstuhl für Photonische Technologien (LPT)

Involved external institutions

Hochschule für angewandte Wissenschaften München DE Germany (DE) Technische Universität Ilmenau DE Germany (DE) Helmholtz-Zentrum Berlin für Materialien und Energie (HZB) DE Germany (DE)

How to cite

APA:

Rapp, S., Heinrich, G., Wollgarten, M., Huber, H.P., & Schmidt, M. (2015). Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation. Journal of Applied Physics, 117(10), 105304. https://doi.org/10.1063/1.4914457

MLA:

Rapp, S., et al. "Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation." Journal of Applied Physics 117.10 (2015): 105304.

BibTeX: Download