Will Darwins's Law Help Us to Improve Our Resist Models?
Tollkühn B, Fühner T, Matiut D, Erdmann A, Semmler A, Küchler B, Kókai G (2003)
Publication Language: English
Publication Type: Conference contribution, Original article
Publication year: 2003
Pages Range: 291-302
Conference Proceedings Title: Advances in Resist Technology and Processing XX
Event location: Santa Clara, CA
ISBN: 9780819448446
URI: http://www2.informatik.uni-erlangen.de/publication/download/spie5039-33.pdf
DOI: 10.1117/12.485078
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How to cite
APA:
Tollkühn, B., Fühner, T., Matiut, D., Erdmann, A., Semmler, A., Küchler, B., & Kókai, G. (2003). Will Darwins's Law Help Us to Improve Our Resist Models? In Theodore H. Fedynyshyn (Eds.), Advances in Resist Technology and Processing XX (pp. 291-302). Santa Clara, CA, US.
MLA:
Tollkühn, Bernd, et al. "Will Darwins's Law Help Us to Improve Our Resist Models?" Proceedings of the Advances in Resist Technology and Processing, SPIE 5039, Santa Clara, CA Ed. Theodore H. Fedynyshyn, 2003. 291-302.
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