Nanomeasuring and nanopositioning engineering

Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Hofmann N (2010)

Publication Status: Published

Publication Type: Journal article

Publication year: 2010


Publisher: Elsevier

Book Volume: 43

Pages Range: 1099-1105

DOI: 10.1016/j.measurement.2010.04.008


Single beam-, double beam- and triple beam-interferometers built in the NPM-Machine for six degrees of freedom measurements are described. (C) 2010 Elsevier Ltd. All rights reserved.

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Jäger, G., Hausotte, T., Manske, E., Büchner, H.-J., Mastylo, R., Vorbringer-Dorozhovets, N., & Hofmann, N. (2010). Nanomeasuring and nanopositioning engineering. Measurement, 43, 1099-1105.


Jäger, Gerd, et al. "Nanomeasuring and nanopositioning engineering." Measurement 43 (2010): 1099-1105.

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