Nanomeasuring and nanopositioning engineering

Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Hofmann N (2006)

Publication Status: Published

Publication Type: Conference contribution

Publication year: 2006


Publisher: International Society for Optical Engineering; 1999

Book Volume: 6280

Pages Range: U9-U17

DOI: 10.1117/12.715237


The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nano structuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

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Jäger, G., Hausotte, T., Manske, E., Büchner, H.-J., Mastylo, R., Vorbringer-Dorozhovets, N., & Hofmann, N. (2006). Nanomeasuring and nanopositioning engineering. (pp. U9-U17). International Society for Optical Engineering; 1999.


Jäger, Gerd, et al. "Nanomeasuring and nanopositioning engineering." International Society for Optical Engineering; 1999, 2006. U9-U17.

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