Nano Measuring Machine for zero Abbe offset coordinate-measuring
Jäger G, Manske E, Hausotte T, Büchner HJ (2000)
Publication Status: Published
Publication Type: Journal article
Publication year: 2000
Journal
Publisher: Oldenbourg Verlag
Book Volume: 67
Pages Range: 319-323
Abstract
The Institute of Process Measurement and Sensor Technology is developing a Nano Measuring Machine for the three-dimensional coordinate-measuring with a measurement range of 25 mm x 25 mm x 5 mm and a resolution of 1.24 nm. This device closes a gap in coordinate-measuring. Three plane-mirror miniature interferometers, one surface sensing probe and two angular sensors are arranged, to realize in all three coordinates zero Abbe offset measurements. The new Nano Measuring Machine will be applied for precision measurement of small pieces and microstructures.
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Germany (DE)How to cite
APA:
Jäger, G., Manske, E., Hausotte, T., & Büchner, H.-J. (2000). Nano Measuring Machine for zero Abbe offset coordinate-measuring. Technisches Messen, 67, 319-323.
MLA:
Jäger, Gerd, et al. "Nano Measuring Machine for zero Abbe offset coordinate-measuring." Technisches Messen 67 (2000): 319-323.
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