Nanometer-scale modification of the tribological properties of Si(111):H surfaces performed and investigated by a conducting-probe scanning force microscope

Hundhausen M, Ley L (1996)

Publication Type: Journal article

Publication year: 1996

Journal

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena American Institute of Physics

Book Volume: 14

Pages Range: 1268

Authors with CRIS profile

Martin Hundhausen Lehrstuhl für Laserphysik Lothar Ley Naturwissenschaftliche Fakultät

How to cite

APA:

Hundhausen, M., & Ley, L. (1996). Nanometer-scale modification of the tribological properties of Si(111):H surfaces performed and investigated by a conducting-probe scanning force microscope. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 14, 1268.

MLA:

Hundhausen, Martin, and Lothar Ley. "Nanometer-scale modification of the tribological properties of Si(111):H surfaces performed and investigated by a conducting-probe scanning force microscope." Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 14 (1996): 1268.

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