Cross-Sectional Scanning Tunneling and Scanning Force Microscopy of Amorphous Hydrogenated Silicon pn-Doping-Superlattices in Nitrogen and Air

Hundhausen M, Ley L (1994)

Publication Type: Journal article

Publication year: 1994

Journal

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena American Institute of Physics

Book Volume: 12

Pages Range: 2440

Authors with CRIS profile

Martin Hundhausen Lehrstuhl für Laserphysik Lothar Ley Naturwissenschaftliche Fakultät

How to cite

APA:

Hundhausen, M., & Ley, L. (1994). Cross-Sectional Scanning Tunneling and Scanning Force Microscopy of Amorphous Hydrogenated Silicon pn-Doping-Superlattices in Nitrogen and Air. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 12, 2440.

MLA:

Hundhausen, Martin, and Lothar Ley. "Cross-Sectional Scanning Tunneling and Scanning Force Microscopy of Amorphous Hydrogenated Silicon pn-Doping-Superlattices in Nitrogen and Air." Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 12 (1994): 2440.

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