Research Grants (5,598)

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Novel development of a slurry-based spray coating technology to create a high temperature and corrosion resistant tantalum carbide protection coating for semiconductor material manufacturing and processing

Internally funded project (01.09.2021 – 01.09.2024)

Towards reliable high-temperature stable SiC CMOS technology - concepts, challenges and solutions

Internally funded project (01.09.2021 – 01.09.2024)

Pathfinding the perfect EUV mask (EUV)

Internally funded project (01.09.2021 – 01.09.2024)

Towards reliable high-temperature stable SiC CMOS technology - concepts, challenges and solutions (HT CMOS)

Internally funded project (01.09.2021 – 01.09.2024)

Modeling and Verification of 4H-SiC TrenchMOS integration using Trench-First-Technology

Internally funded project (01.09.2021 – 01.09.2024)

Alternatives Herstellungsverfahren von flexiblen Interconnects basierend auf dem Island-Bridge-Konzept

Internally funded project (01.09.2021 – 01.09.2024)

Modelling Nanomechanical Effects in Advanced Lithographic Materials and Processes

Internally funded project (01.09.2021 – 01.09.2024)

Novel Approach to SiC Power Device Fabrication: High-Purity Semi-insulating Substrates Doped by Energy-Filtered Ion Implantation

Internally funded project (01.09.2021 – 01.09.2024)

Functionalization of the Tunnel Effect for Novel Power Transistor Concepts.

Internally funded project (01.09.2021 – 01.09.2024)

Smarte Thermische Bodenclusterung für die neuen Vorhaben der StromNetzDC Kooperation (ThermoCluster)

Third party funded individual grant (15.05.2024 – 31.08.2024)

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