ANNEALSYS SAS

Industry / private company


Location: Montpellier, France (FR) FR

close-button

Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

From
To

Abstract

Journal

Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments (2023) Badie C, Tissot H, Sciacca B, Barr M, Bachmann J, Vallée C, Gautier G, et al. Journal article