Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)
Research facility
Location:
Erlangen,
Germany (DE)
ISNI: 0000000104810543
ROR: https://ror.org/04q5rka56
Implantation of nitrogen into polysilicon to suppress boron penetration through the gate oxide (1999)
Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H
Conference contribution, Conference Contribution
Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO (1999)
Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H
Conference contribution, Conference Contribution
Local material removal by focused ion beam milling and etching (1995)
Lipp S, Frey L, Franz G, Demm E, Petersen S, Ryssel H
Journal article, Original article
Improved delineation technique for two dimensional dopant profiling (1995)
Gong L, Petersen S, Frey L, Ryssel H
Journal article, Original article
Tribological properties of carbonized photoresist (1991)
Oechsner R, Kluge A, Frey L, Ryssel H
Journal article, Original article