Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

From
To

Abstract

Journal

Investigation of the reliability of 4H-SiC MOS devices for high temperature applications (2011) Le-Huu M, Schmitt H, Noll S, Grieb M, Schrey FF, Bauer AJ, Frey L, Ryssel H Journal article, Original article Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC (2011) Schmitt H, Haeublein V, Bauer A, Frey L Authored book, Volume of book series Impact of carbon junction implant on leakage currents and defect distribution: Measurement and simulation (2011) Roll G, Jakschik S, Burenkov A, Goldbach M, Mikolajick T, Frey L Journal article, Original article Comparative study on metallization and passivation materials for high temperature sensor applications (2011) Daves W, Krauss A, Le-Huu M, Kronmüller S, Haeublein V, Bauer A, Frey L Authored book, Volume of book series Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications (2011) Daves W, Krauss A, Behnel N, Haeublein V, Bauer A, Frey L Journal article, Original article 4H-SiC n-MOSFET logic circuits for high temperature operation (2011) Frey L, Le-Huu M, Grieb M, Schrey F, Schmitt H, Haeublein V, Bauer A, Ryssel H Authored book, Volume of book series Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy (2011) Yanev V, Rommel M, Bauer AJ, Frey L Journal article, Original article Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application (2010) Hinz J, Bauer AJ, Frey L Journal article A Highly Integrated EMI Filter Using Polymer Bonded Soft Magnetics as Core Material (2010) Egelkraut S, März M, Rauch M, Schletz A, Frey L Conference contribution